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POSSIBILITY OF CONFOCAL MICROSCOPY WHEN ASSESSING MICROGEOMETRY
OF SURFACE
Alfyorova E.A.
, Ph.D. (Physics and Mathematics), Associate Professor, e-mail:
katerina525@mail.ruJiang Dilong
, Master’s Degree student, e-mail:
408912814@qq.comNational Research Tomsk Polytechnic University, 30 Lenin Avenue, Tomsk, 634050, Russian
Federation
Abstract
Today in the world there is no single standard approach to evaluating the surface roughness. On
the one hand, we have too much parameters, and on the other, they are not always sufficient for
describing and evaluating the surfaces with special properties. Today, however, many new
measurement tools and methods appear. All this leads to the question of the comparability of the
results obtained in different ways. The paper compares the results of the measurement of two-
dimensional roughness parameter Ra (arithmetic mean deviation of the assessed profile) and its
three-dimensional analogue of Sa (arithmetical mean height of the scale limited surface), obtained
by confocal microscopy with the value indicated on the samples roughness. We have demonstrated
that the characteristics of the lens affect to the obtained result. The causes of results mismatch are
considered and recommendations on the choice of the lens zoom offers. The possibility of using
confocal microscopy in the technical measurements and scientific research are discussed.
Keywords
confocal microscopy, two-dimensional and three-dimensional roughness parameters
Funding
The reported study was funded by RFBR, according to the research project No. 16-32-60007
mol_а_dk